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FLIP CHIP BONDER A110 |
X-Y Gantry ±¸Á¶¸¦ ÀÌ¿ëÇÑ ³ôÀº Á¤¹Ðµµ
Dual Bonding Head·Î ÀÎÇÑ ³ôÀº »ý»ê¼º
12inch wafer Frame±îÁö ¼ö¿ëÀÌ °¡´ÉÇÑ À¯¿¬ÇÑ Àåºñ
¸Å¿ì ½±°Ô ±³Ã¼°¡ °¡´ÉÇÑ Conversion Kit
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Productivity |
UPH |
80 Units ±âÁØ 5.500 Pre Aline ±â´É êó |
Accuracy |
X-Y placement |
±10.0 µm @ 3 σ |
Chip rotation (θ) |
±0.1° @ 3 σ |
Bonding Head |
Bonding force |
1N ~ 25N (1N °£°ÝÀ¸·Î ÇÁ·Î±×·¥ °¡´É) |
Footprint |
Dimension (WxDxH) |
1,730mm x 1,200mm x 1,500mm |
weight |
3,000kg |
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